Title:
TWO-DIMENSIONAL ELECTROSTATIC ACTUATOR
Document Type and Number:
Japanese Patent JPH07274542
Kind Code:
A
Abstract:
PURPOSE: To realize movement in the two-dimensional direction by arraying electrodes in the two-dimensional directions on the same surface in the electrodes arranged in two dimensions in a woven manner and reducing the sizes of the stator and the rotor.
CONSTITUTION: A stator 1 with woven-shaped fixed electrodes disposed between insulating films and consisting of mutually crossing first insulating electrode wires 5 and second insulating electrode wires 6 and a rotor 7 placed on the stator 1 are provided, mobile electric fields are generated around the woven- shaped fixed electrodes by applying alternating voltage to the woven-shaped fixed electrodes, and the rotor 7 is moved by coulomb's force.
Inventors:
HIGUCHI TOSHIRO
YASHIRO SUSUMU
SHINNO TOSHIKI
YASHIRO SUSUMU
SHINNO TOSHIKI
Application Number:
JP6189394A
Publication Date:
October 20, 1995
Filing Date:
March 31, 1994
Export Citation:
Assignee:
KANAGAWA KAGAKU GIJUTSU AKAD
SEKISUI CHEMICAL CO LTD
SEKISUI CHEMICAL CO LTD
International Classes:
G12B5/00; H02N1/00; (IPC1-7): H02N1/00; G12B5/00
Attorney, Agent or Firm:
Shimizu Mamoru