Title:
TWO-DIMENSIONAL INTERFERENCE PATTERN IMAGING DEVICE
Document Type and Number:
Japanese Patent JP2017090414
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide technology with which it is possible to mono-dimensionally scan a test object using a two-dimensional interferometer and easily and efficiently acquire the data needed for two-dimensional phase restoration.SOLUTION: Provided is a two-dimensional interference pattern imaging device equipped with a two-dimensional interferometer for forming an interference pattern having two cyclic directions due to an electromagnetic wave having permeated a test object, a detector for imaging the interference pattern, and movement means for moving the test object and/or the two-dimensional interferometer, wherein the relative positions of the test object and the two-dimensional interferometer are changed in a mono-dimensional scan direction different from any of the two cyclic directions by the movement means, and while so doing, images are captured N times by the detector (N is an integer greater than or equal to 2), thereby acquiring N items of image data used in the phase restoration of the test object.SELECTED DRAWING: Figure 3
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Inventors:
NAGAI KENTARO
Application Number:
JP2015224976A
Publication Date:
May 25, 2017
Filing Date:
November 17, 2015
Export Citation:
Assignee:
CANON KK
International Classes:
G01N23/20; A61B6/00
Attorney, Agent or Firm:
Kazunobu Sera
Yoshiyuki Kawaguchi
Koichiro Sakai
Takeshi Nakamura
Takeshi Niwa
Ryota Morihiro
Yoshiyuki Kawaguchi
Koichiro Sakai
Takeshi Nakamura
Takeshi Niwa
Ryota Morihiro