Title:
二流体ノズル、基板洗浄装置および基板洗浄方法
Document Type and Number:
Japanese Patent JP5031542
Kind Code:
B2
Inventors:
Kaneko Satoshi
Application Number:
JP2007334492A
Publication Date:
September 19, 2012
Filing Date:
December 26, 2007
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
H01L21/304; B05B7/04
Domestic Patent References:
| JP2005294819A | ||||
| JP2000246153A | ||||
| JP8187470A |
Attorney, Agent or Firm:
Kenji Yoshitake
Hiroyuki Nagai
Junpei Okada
Hirohito Katsunuma
Hiroki Kashima
Hiroyuki Nagai
Junpei Okada
Hirohito Katsunuma
Hiroki Kashima