Title:
【発明の名称】2重押退けポンプ
Document Type and Number:
Japanese Patent JP2882748
Kind Code:
B2
Abstract:
The purpose of a two-stage positive displacement pump (1) is, in particular, to cooperate with a turbomolecular drag pump (2) which can be connected upstream thereof. In the arrangement, the two-stage positive displacement pump (1) is designed, according to the invention, as a hybrid pump (3) which on the medium inlet side has a piston pump (5) with a comparatively large swept volume (piston-swept volume) (6), the piston-cylinder chamber (7) of said pump being sealed with respect to the crank chamber (8) by means of a sealing membrane (9). Another integral aspect of the inventive design of the two-stage positive displacement pump (1) is that in the hybrid pump (3) there is connected, downstream of the piston pump (5), a diaphragm pump (10) whose swept volume (11) is appreciably smaller compared to that of the piston pump (5).
Inventors:
EERITSUHI BETSUKAA
Application Number:
JP7606094A
Publication Date:
April 12, 1999
Filing Date:
April 14, 1994
Export Citation:
Assignee:
KAA ENU EFU NOIBERUGAA GMBH
International Classes:
F04B23/06; F04B25/00; F04B37/00; F04B39/04; F04B45/04; F04D19/04; F04D25/16; (IPC1-7): F04B25/00; F04B45/04
Attorney, Agent or Firm:
Toshio Yano (2 outside)