Title:
MASTER/SLAVE TYPE PRESSURE CONTROLLER
Document Type and Number:
Japanese Patent JP2803776
Kind Code:
B2
Abstract:
PURPOSE: To provide the master/slave type pressure controller which can reduce dispersion in the flow rate position to start/stop operating a large flow rate reducing valve.
CONSTITUTION: Concerning the master/slave pressure controller for supplying gas to be supplied from an outlet part 3 to any other instrument while reducing its pressure over multiple stages, this device is provided with a large flow rate reducing valve 1 for reducing the pressure of gas to be supplied down to specified pressure and supplying it to the outlet part 3, small flow rate reducing valve 2 for supplying that reduced gas to the side of a flow-out port 1b of the large flow rate reducing valve 1 while more highly setting the pressure of pressure reduction than this large flow rate reducing valve 1, small flow meter 6 provided between a flow-out port 2b of this small flow rate reducing valve 2 and the flow-out port 1b side of the large flow rate reducing valve 1, and flow rate control valve 8 provided between a flow-out port 6b of this small flow meter 6 and the flow-out port 1b side of the large flow rate reducing valve 1 so as to regulate the flow of gas from the side of the small flow rate reducing valve 2 to the side of the large flow rate reducing valve 1.
Inventors:
Suzuki Toshihiko
Application Number:
JP7081794A
Publication Date:
September 24, 1998
Filing Date:
April 08, 1994
Export Citation:
Assignee:
Yazaki Corporation
International Classes:
G05D16/06; (IPC1-7): G05D16/06
Domestic Patent References:
| JP4157509A | ||||
| JP5210422A | ||||
| JP5398523A | ||||
| JP6307971A | ||||
| JP378307U |
Attorney, Agent or Firm:
Hidekazu Miyoshi (8 outside)