Title:
紫外線露光機
Document Type and Number:
Japanese Patent JP4414866
Kind Code:
B2
Inventors:
Junichi Baba
Kazuhide Ishigami
Kazuhide Ishigami
Application Number:
JP2004336171A
Publication Date:
February 10, 2010
Filing Date:
November 19, 2004
Export Citation:
Assignee:
Kyushu Nanotech Optical Co., Ltd.
International Classes:
G03F7/20; H01L21/027; H01L33/00
Domestic Patent References:
| JP4329517A | ||||
| JP10190058A | ||||
| JP2000094444A | ||||
| JP2000305279A | ||||
| JP2002303988A | ||||
| JP2002536196A | ||||
| JP2003163158A | ||||
| JP2003188415A | ||||
| JP2004239749A | ||||
| JP2004240216A | ||||
| JP2004358770A | ||||
| JP2004508162A | ||||
| JP2005162880A | ||||
| JP2005177696A |
Attorney, Agent or Firm:
Kenichi Takeda
Akihiro Takeda
Akihiro Takeda