ULTRAVIOLET LIGHT GENERATOR - USHIO ELECTRIC INC

Title:

ULTRAVIOLET LIGHT GENERATOR

Document Type and Number:

Japanese Patent JP2023157429

Kind Code:

A

Abstract:

To improve starting performance in an ultraviolet light generator that uses an excimer lamp as an ultraviolet light source.SOLUTION: An ultraviolet light generator includes an excimer lamp having a discharge vessel filled with discharge gas, a first electrode body and a second electrode body arranged so as not to be exposed to discharge gas, and a first conductor electrically connected to one of the first electrode body and the second electrode body. The first conductor is arranged to face the other electrode body or a second conductor electrically connected to the other electrode body via a dielectric member, and the first conductor generates an atmospheric discharge around the first conductor.SELECTED DRAWING: Figure 10

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Inventors:

KUNO AKIHIRO
YAGYU HIDEAKI
FUJISAWA SHIGEKI

Application Number:

JP2022067346A

Publication Date:

October 26, 2023

Filing Date:

April 15, 2022

Export Citation:

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Assignee:

USHIO ELECTRIC INC

International Classes:

H01J65/00; H01J61/54

Attorney, Agent or Firm:

Patent Attorney Corporation Junias International Patent Office

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