Title:
ULTRA COMPACT SIZE DIFFERENTIAL/TETRODE HYBRID ION PUMP
Document Type and Number:
Japanese Patent JP2015209844
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide an ion pump.SOLUTION: This ion pump comprises at least one electron source constructed to discharge electrons into an ion pump; at least one cathode arranged at a position where it comes from at least one electron source across the ion pump; and a high voltage grid arranged between at least one electron source and at least one cathode. The high voltage grid is constituted in such a way that it draws in electrons between at least one electron source and at least one cathode, the electrons strike against gaseous molecules to cause the gaseous molecules to be ionized. At least one cathode draws ionized gaseous molecules toward at least one cathode, resulting in that the ionized gaseous molecules are caught by at least one cathode or caught near that cathode.
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Inventors:
KARL D NELSON
STEVEN TIN
STEVEN TIN
Application Number:
JP2015086616A
Publication Date:
November 24, 2015
Filing Date:
April 21, 2015
Export Citation:
Assignee:
HONEYWELL INT INC
International Classes:
F04B37/02; H01J41/14
Attorney, Agent or Firm:
Shinjiro Ono
Yasushi Kobayashi
Shigeo Takeuchi
Osamu Yamamoto
Yasushi Kobayashi
Shigeo Takeuchi
Osamu Yamamoto