Title:
ULTRA-COMPACT SURFACE SENSOR AND SURFACE MEASURING DEVICE
Document Type and Number:
Japanese Patent JP3111612
Kind Code:
B2
Abstract:
PURPOSE: To obtain an ultra-compact surface sensor, which can be built into various devices, by integrally constituting an electron beam source, an accelerating electrode and a detector on a substrate.
CONSTITUTION: When the voltage of several hundred volts is applied between a substrate 12 and a drawing electrode 14, an electron beam 20 is drawn from a cathode 11 by the electric field discharge. The drawn electron beam 20 is accelerated and focused by applying the voltage of several thousand volts to an accelerating electrode 102. This electron beam 20 is irradiated to the sample 70, and the secondary electron generated at the time of irradiation and the reflected electron are detected by a detector 103. A surface sensor 201 itself is made ultra-compact by integrating an electron beam source 101, an accelerating electrode 102 and a detector 103 to form a surface sensor 201, and the sensor 201 can be built into various devices.
Inventors:
Takehiko Nakahara
Masao Etchu
Yoko Miyazaki
Hideki Komori
Nobuyuki Kosaka
Masao Etchu
Yoko Miyazaki
Hideki Komori
Nobuyuki Kosaka
Application Number:
JP7955892A
Publication Date:
November 27, 2000
Filing Date:
April 01, 1992
Export Citation:
Assignee:
Mitsubishi Electric Corporation
International Classes:
H01J37/28; G01N23/225; G01N23/227; H01J1/30; H01J37/073; (IPC1-7): H01J37/28; H01J37/073
Domestic Patent References:
| JP4179116A | ||||
| JP63269445A | ||||
| JP2226635A |
Attorney, Agent or Firm:
Kaneo Miyata (2 outside)