Title:
極低濃度ガス発生方法及びそのための装置
Document Type and Number:
Japanese Patent JP5041623
Kind Code:
B2
Inventors:
Hiroshi Iwamoto
Takashi Kameya
Kohei Urano
Takashi Kameya
Kohei Urano
Application Number:
JP2001075955A
Publication Date:
October 03, 2012
Filing Date:
March 16, 2001
Export Citation:
Assignee:
Kohei Urano
Gastech Co., Ltd.
Gastech Co., Ltd.
International Classes:
B01J7/00; C07D319/24
Domestic Patent References:
| JP961314A |
Attorney, Agent or Firm:
Kyoko Kawamura
Isao Sasaki
Isao Sasaki