Title:
超微小押し込み試験装置
Document Type and Number:
Japanese Patent JP4008176
Kind Code:
B2
Abstract:
There is provided a ultra micro indentation testing apparatus comprising: a lever stand (4) provided with a center lever (3) having a silicon probe (1) and a diamond indenter (2) disposed therein; a moving mechanism (7) for moving the lever stand (4) in a triaxial direction; aindentationg-in mechanism (6) for pushing the diamond indenter (2) in a sample; a displacement gage (10) for measuring a displacement of the silicon probe (1) or the diamond indenter (2); and an optical picture device (11) for use in positioning the silicon probe (1) or the diamond indenter (2) and observing the surface of the sample; wherein the apparatus has, in combination, all of the hardness measuring function based on measurement of the force and depth of the diamond indenter pushed in the surface of the sample, the atomic force microscopic function of acquiring the shape of the surface of the sample based on a displacement of the diamond indenter or the silicon probe, and the optical microscopic function of observing the surface of the sample by the optical picture device. Furthermore, the testing apparatus is equipped with both of the function of measuring the hardness of the surface of material in a ultra micro region and the surface observing function with high accuracy.
Inventors:
Nagashima Nobuo
Kensuke Miyahara
Matsuoka Saburo
Kensuke Miyahara
Matsuoka Saburo
Application Number:
JP2000034225A
Publication Date:
November 14, 2007
Filing Date:
February 10, 2000
Export Citation:
Assignee:
Japan Science and Technology Agency
National Institute for Materials Science
National Institute for Materials Science
International Classes:
G01B7/34; G01N3/40; G01B9/04; G01B11/00; G01N3/42; G01N3/02; G01N3/06; G01Q60/38
Domestic Patent References:
| JP6028708U | ||||
| JP10185802A | ||||
| JP8159941A | ||||
| JP10038547A | ||||
| JP10511176A | ||||
| JP10506457A | ||||
| JP5281119A | ||||
| JP11271202A | ||||
| JP6025721B2 | ||||
| JP3259728A | ||||
| JP2281125A |
Foreign References:
| US4820051 | ||||
| US4852397 |
Attorney, Agent or Firm:
Toshio Nishizawa