Title:
超短波長超狭帯域幅高出力レーザの光スペクトル出力の帯域幅の測定方法及び装置
Document Type and Number:
Japanese Patent JP4814790
Kind Code:
B2
Abstract:
An apparatus and method for controlling a laser system is disclosed which may comprise a spectrometer adapted to measure an unknown bandwidth of a spectrum of light emitted from the laser, which may comprise an optical bandwidth measuring unit adapted to provide as an output a measured parameter, which is indicative of a parameter of the unknown bandwidth of the spectrum being measured; a reported parameter computing unit adapted to compute a reported parameter of the unknown bandwidth of the spectrum being measured according to the formula: Reported Parameter("RP")=A*(Measured Parameter("MP"))+C, wherein the RP and MP are a different type of parameter and the values of A and C are determined based upon calibration of the optical bandwidth measuring unit MP response for light of known valued of RP.
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Inventors:
La Fuck Robert Jay
Application Number:
JP2006517529A
Publication Date:
November 16, 2011
Filing Date:
June 14, 2004
Export Citation:
Assignee:
Cymer Incorporated
International Classes:
G01J3/26; G01J1/42; G01J3/02; G01J3/28; G01J3/36; G01J3/45; G01J9/00; H01S3/00; H01S3/13; H01S3/225
Domestic Patent References:
| JP2001165770A | 2001-06-22 | |||
| JP2000205952A | 2000-07-28 |
Foreign References:
| WO2003016841A1 | 2003-02-27 | |||
| US5978394A | 1999-11-02 |
Attorney, Agent or Firm:
Sadao Kumakura
Fumiaki Otsuka
Takaki Nishijima
Hiroyuki Suda
Fumiaki Otsuka
Takaki Nishijima
Hiroyuki Suda