Title:
超小形電気機械式横方向加速度計
Document Type and Number:
Japanese Patent JP3657606
Kind Code:
B2
Abstract:
A microelectromechanical accelerometer having submicron features is fabricated from a single crystal silicon substrate. The accelerometer includes a movable portion incorporating an axial beam carrying laterally-extending high aspect ratio released fingers cantilevered above the floor of a cavity formed in the substrate during the fabrication process. The movable portion is supported by restoring springs having controllable flexibility to vary the resonant frequency of the structure. A multiple-beam structure provides stiffness in the movable portion for accuracy.
Inventors:
Shaw, Kevin Aye
Adams, Scott Gee
McDonald's, Noel See
Adams, Scott Gee
McDonald's, Noel See
Application Number:
JP50075595A
Publication Date:
June 08, 2005
Filing Date:
May 23, 1994
Export Citation:
Assignee:
CORNELL RESEARCH FOUNDATION, INCORPORATED
International Classes:
B60G23/00; B81B3/00; B81C1/00; G01P1/00; G01P15/08; G01P15/125; G01P15/13; H01L29/84; (IPC1-7): G01P15/125
Domestic Patent References:
| JP62123361A | ||||
| JP7098327A | ||||
| JP6331651A | ||||
| JP5142251A | ||||
| JP4232875A | ||||
| JP4115165A | ||||
| JP3229160A | ||||
| JP1253657A | ||||
| JP4504003A |
Attorney, Agent or Firm:
Aoyama Aoi
Osamu Kawamiya
Osamu Kawamiya