To extend a measuring range of a molecular resistance type pressure gauge toward a higher and a lower sides of the pressure by a constitution wherein a vibration member is movably attached in the vicinity of a stationary member.

An ultra-small mechanical mass and a spring system of which movement is attenuated in proportion to a pressure of an ambient gas, are used. The movement of the mass is electrostatically excited and detected. A range of the pressure to be measured is extended by using the spring system made of a material having low inner attenuation, e.g. a single crystal silicon. A relationship of attenuation dependency of gas resistance is extended by bringing a moving member close to a stationary member. A cantilever beam 21 is supported with a fixing section 23 on an insulation substrate 22 such as a pyrex so that they act as the mass and spring. The beam 21 is made of a doped silicon and is electrically connected to the external section via the fixing section. Electrostatic driving is executed such that a sine wave is applied across the beam 21 and an electrode plate 25.