Title:
ULTRA-THIN FILM LAMINATED BODY
Document Type and Number:
Japanese Patent JP3427448
Kind Code:
B2
Abstract:
PURPOSE: To provide an ultra-thin film laminated body formed on the surface of the hard substrate of a cutting tool, a wear resistant tool, etc., or the surface of each of electric and electronic parts, sliding parts and machine parts so as to improve the wear resistance or surface protecting function.
CONSTITUTION: The surface of a substrate 2 is coated with an ultra-thin film laminated body 1 having a structure obtd. by repeatedly laminating layers of three or more kinds of compds. each composed of one or more kinds of elements selected from among groups IVa, Va and metallic elements of the periodic table, Al, Si, B and C and one or more kinds of elements selected from among B, C, N and O. The thickness of each of the layers is 0.5-20nm and the total thickness is 0.5-10μm. The laminated body 1 is used as the hard coating film of a cutting tool or a wear resistant tool or as a wear resistant film or a protective film on the surface of each of electric and electronic parts, sliding parts and machine parts.
Inventors:
Makoto Setoyama
Akira Nakayama
Haruyo Fukui
Go Yoshioka
Kazuo Yamagata
Akinori Kobayashi
Yasuhisa Hashimoto
Akira Nakayama
Haruyo Fukui
Go Yoshioka
Kazuo Yamagata
Akinori Kobayashi
Yasuhisa Hashimoto
Application Number:
JP27841193A
Publication Date:
July 14, 2003
Filing Date:
November 08, 1993
Export Citation:
Assignee:
Sumitomo Electric Industries, Ltd.
International Classes:
B23B27/14; B23P15/28; C01B21/06; C01G1/00; C01G37/00; C23C14/06; C23C28/00; (IPC1-7): C23C14/06; B23P15/28; C01B21/06; C01G1/00; C01G37/00; C23C28/00
Other References:
金原 あきら編，薄膜＜その機能と応用＞，日本，日本規格協会，１９９１年 ４月２０日，第１版，ｐ．２３５−２４３，２５４−２５６
Attorney, Agent or Firm:
Bunji Kamata (2 outside)
Previous Patent: POLYMER CONTAINING FLUORINATED PHENYLBORONIC ACID GROUP
Next Patent: DISSOLVING DEVICE FOR CHEMICAL FOR DIALYZATE
Next Patent: DISSOLVING DEVICE FOR CHEMICAL FOR DIALYZATE