Title:
ULTRAPURE ALUMINUM MATERIAL AND MANUFACTURING METHOD THEREOF
Document Type and Number:
Japanese Patent JP2014058717
Kind Code:
A
Abstract:
To provide an aluminum material that further suppresses an impurity level and possesses a high residual resistance ratio, and a manufacturing (refinement) method thereof.
Provided are an aluminum material in which a size effect correction value of a residual resistance ratio is over 10 million and equal to or lower than 15 million, and a manufacturing method of the aluminum material that performs zone melting refinement of an aluminum material in which the total content of five elements of a peritectic system consisting of titanium (Ti), vanadium (V), chromium (Cr), zirconium (Zr) and molybdenum (Mo) is 0.06 ppm by mass or lower.
Inventors:
HOSHIKAWA KOSUKE
TABUCHI HIROSHI
RIKI TSUNETAKA
NAKAMURA KAKUYOSHI
WATANABE MASAHIKO
TABUCHI HIROSHI
RIKI TSUNETAKA
NAKAMURA KAKUYOSHI
WATANABE MASAHIKO
Application Number:
JP2012204084A
Publication Date:
April 03, 2014
Filing Date:
September 18, 2012
Export Citation:
Assignee:
SUMITOMO CHEMICAL CO
International Classes:
C22C21/00; B22D21/04; B22D27/04; C22B21/06; C22C1/02; C30B29/38; H01L21/205
Domestic Patent References:
| JP2011195903A | 2011-10-06 | |||
| JPH10102158A | 1998-04-21 |
Other References:
JPN6016022070; Ｅｉｊｉ ＨＡＳＨＩＭＯＴＯ ｅｔ ａｌ: 'Ｚｏｎｅ Ｒｅｆｉｎｉｎｇ ｏｆ Ｈｉｇｈ-Ｐｕｒｉｔｙ Ａｌｕｍｉｎｕｍ' Ｍａｔｅｒｉａｌｓ Ｔｒａｎｓａｃｔｉｏｎｓ， ＪＩＭ Ｖｏｌ．３５，Ｎｏ．４, 199404, ｐ２６２-２６５, 日本金属学会
JPN6015017916; 橋本英二 他１名: 'ＩＴと高純度金属 高純度金属の残留抵抗と純度評価' 金属 Ｖｏｌ．７２ Ｎｏ．８, 20020801, Ｐａｇｅ．７６４-７６９
JPN6016022067; 上田善武 他: '超高純度金属の物性-格子欠陥制御によってみえた新しい電子輸送現象-' 日本物理学会講演概要集 １９９６年秋の分科会第２分冊, 19961001, ｐ３３（２ａ-Ｎ-１１）, 日本物理学会
JPN6016022067; 上田善武 他: '超高純度金属の物性-格子欠陥制御によってみえた新しい電子輸送現象-' 日本物理学会講演概要集 １９９６年秋の分科会第２分冊, 19961001, ｐ３３（２ａ-Ｎ-１１）, 日本物理学会
JPN6016042625; Ｅ． Ｈａｓｈｉｍｏｔｏ ｅｔ ａｌ．: 'Ｐｕｒｉｆｉｃａｔｉｏｎ ｏｆ Ｕｌｔｒａ-Ｈｉｇｈ Ｐｕｒｉｔｙ Ａｌｕｍｉｎｕｍ' ＪＯＵＲＮＡＬ ＤＥ ＰＨＹＳＩＱＵＥ ＩＶ ｖｏｌ．５，Ｎｏ．Ｃ７, 1995, ｐｐ１５３-１５７
JPN6016022070; Ｅｉｊｉ ＨＡＳＨＩＭＯＴＯ ｅｔ ａｌ: 'Ｚｏｎｅ Ｒｅｆｉｎｉｎｇ ｏｆ Ｈｉｇｈ-Ｐｕｒｉｔｙ Ａｌｕｍｉｎｕｍ' Ｍａｔｅｒｉａｌｓ Ｔｒａｎｓａｃｔｉｏｎｓ， ＪＩＭ Ｖｏｌ．３５，Ｎｏ．４, 199404, ｐ２６２-２６５, 日本金属学会
JPN6015017916; 橋本英二 他１名: 'ＩＴと高純度金属 高純度金属の残留抵抗と純度評価' 金属 Ｖｏｌ．７２ Ｎｏ．８, 20020801, Ｐａｇｅ．７６４-７６９
JPN6015017916; 橋本英二 他１名: 'ＩＴと高純度金属 高純度金属の残留抵抗と純度評価' 金属 Ｖｏｌ．７２ Ｎｏ．８, 20020801, Ｐａｇｅ．７６４-７６９
JPN6016022067; 上田善武 他: '超高純度金属の物性-格子欠陥制御によってみえた新しい電子輸送現象-' 日本物理学会講演概要集 １９９６年秋の分科会第２分冊, 19961001, ｐ３３（２ａ-Ｎ-１１）, 日本物理学会
JPN6016022067; 上田善武 他: '超高純度金属の物性-格子欠陥制御によってみえた新しい電子輸送現象-' 日本物理学会講演概要集 １９９６年秋の分科会第２分冊, 19961001, ｐ３３（２ａ-Ｎ-１１）, 日本物理学会
JPN6016042625; Ｅ． Ｈａｓｈｉｍｏｔｏ ｅｔ ａｌ．: 'Ｐｕｒｉｆｉｃａｔｉｏｎ ｏｆ Ｕｌｔｒａ-Ｈｉｇｈ Ｐｕｒｉｔｙ Ａｌｕｍｉｎｕｍ' ＪＯＵＲＮＡＬ ＤＥ ＰＨＹＳＩＱＵＥ ＩＶ ｖｏｌ．５，Ｎｏ．Ｃ７, 1995, ｐｐ１５３-１５７
JPN6016022070; Ｅｉｊｉ ＨＡＳＨＩＭＯＴＯ ｅｔ ａｌ: 'Ｚｏｎｅ Ｒｅｆｉｎｉｎｇ ｏｆ Ｈｉｇｈ-Ｐｕｒｉｔｙ Ａｌｕｍｉｎｕｍ' Ｍａｔｅｒｉａｌｓ Ｔｒａｎｓａｃｔｉｏｎｓ， ＪＩＭ Ｖｏｌ．３５，Ｎｏ．４, 199404, ｐ２６２-２６５, 日本金属学会
JPN6015017916; 橋本英二 他１名: 'ＩＴと高純度金属 高純度金属の残留抵抗と純度評価' 金属 Ｖｏｌ．７２ Ｎｏ．８, 20020801, Ｐａｇｅ．７６４-７６９
Attorney, Agent or Firm:
Toru Nakayama
Toru Sakamoto
Toru Sakamoto
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