Title:
ULTRAPURE WATER PRODUCTION SYSTEM AND METHOD
Document Type and Number:
Japanese Patent JP2016107249
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide an ultrapure water production system and method which can very stably produce high quality ultrapure water.SOLUTION: An ultrapure water production system comprises: a main ultrapure water production system; water to be treated supply control means that supplies recovered water to the main ultrapure water production system; an ultrapure water production sub-system that is configured equivalent to the main ultrapure water production system and independently treats water to be treated same as water to be treated supplied to the main ultrapure water production system; first detection means that detects the total organic carbon concentration in treated water of the ultrapure water production sub-system; and water to be treated supply amount control means that inputs a control signal to the water to be treated supply control means on the basis of a detection signal of the first detection means.SELECTED DRAWING: Figure 1
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Inventors:
NOGUCHI YUKIO
IIYAMA MASAMITSU
IIYAMA MASAMITSU
Application Number:
JP2014250180A
Publication Date:
June 20, 2016
Filing Date:
December 10, 2014
Export Citation:
Assignee:
NOMURA MICRO SCIENCE KK
International Classes:
C02F1/32; B01D61/08; B01D61/44; C02F1/20; C02F1/42; C02F1/44; C02F1/469; C02F1/72; C02F9/00
Attorney, Agent or Firm:
Patent Business Corporation Sakura International Patent Office