超純水供給設備 - Kurita Water Industries Ltd.

Title:

超純水供給設備

Document Type and Number:

Japanese Patent JP4483160

Kind Code:

B2

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Inventors:

Tadahiro Ohmi
Masahiko Kogure
Takayuki Imaoka
Ikenori Yokoi

Application Number:

JP2002209906A

Publication Date:

June 16, 2010

Filing Date:

July 18, 2002

Export Citation:

Assignee:

Kurita Water Industries Ltd.
Tadahiro Ohmi
Nomura Micro Science Co., Ltd.
Organo Corporation

International Classes:

B01D61/00; C02F1/00; B01D19/00; C02F1/20

Domestic Patent References:

Attorney, Agent or Firm:

Tsuyoshi Shigeno

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