Title:
ULTRAPURE WATER SYSTEM AND ULTRAPURE WATER PRODUCTION METHOD
Document Type and Number:
Japanese Patent JP2017127875
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide an ultrapure water system capable producing, by reducing footprint and inexpensively, high-purity ultrapure water satisfying sufficiently a demand water quality; and to provide an ultrapure water production method.SOLUTION: In an ultrapure water system including a pretreatment system, a primary pure water system and a sub-system, the primary pure water system includes a high pressure type reverse osmosis membrane separation device, a deaeration unit, an ultraviolet oxidation device and an ion exchanger in this order.SELECTED DRAWING: None
Inventors:
IKUNO NOZOMI
Application Number:
JP2017089753A
Publication Date:
July 27, 2017
Filing Date:
April 28, 2017
Export Citation:
Assignee:
KURITA WATER IND LTD
International Classes:
C02F9/02; B01D61/00; B01D61/04; B01D61/48; B01D61/58; B01J39/05; B01J39/09; B01J41/05; B01J41/09; B01J47/02; B01J47/028; B01J49/05; B01J49/06; B01J49/07; B01J49/08; C02F1/20; C02F1/32; C02F1/42; C02F1/44; C02F1/469; C02F9/04; C02F9/06; C02F9/12
Attorney, Agent or Firm:
Kaoru Watanabe