Title:
超音波洗浄装置
Document Type and Number:
Japanese Patent JP4248257
Kind Code:
B2
Inventors:
Hideki Sonokawa
Application Number:
JP2003007201A
Publication Date:
April 02, 2009
Filing Date:
January 15, 2003
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
B08B3/12; H01L21/304
Domestic Patent References:
| JP10027771A | ||||
| JP7328571A |
Attorney, Agent or Firm:
Kikuhiko Nakamoto