Title:
ULTRASONIC ELEMENT AND ULTRASONIC DEVICE
Document Type and Number:
Japanese Patent JP2022094478
Kind Code:
A
Abstract:
To provide an ultrasonic element that prevents damage to a diaphragm even when decompressed.SOLUTION: An ultrasonic element 1 comprises: a substrate 2 having an opening 7 formed therein; a diaphragm 3 provided on the substrate 2, having a first surface 3a in contact with the substrate 2, and closing the opening 7; piezoelectric elements 11 provided on a second surface 3b of the diaphragm 3 on the opposite side of the first surface 3a; a protective substrate 5 facing the second surface 3b and protecting the piezoelectric elements 11; and prevention parts 4 provided between the protective substrate 5 and the diaphragm 3 and preventing vibration of the diaphragm 3. The piezoelectric elements 11 each have a first electrode 12, a piezoelectric layer 13, and a second electrode 14 laminated in order from the second surface 3b. When a portion where the first electrode 12, the piezoelectric layer 13, and the second electrode 14 overlap is an active part 15, in plan view from a lamination direction 16, the prevention parts 4 are provided on the periphery of the active part 15, and a slit 18 is formed in each of the prevention parts 4.SELECTED DRAWING: Figure 3
Inventors:
KOJIMA CHIKARA
Application Number:
JP2020207380A
Publication Date:
June 27, 2022
Filing Date:
December 15, 2020
Export Citation:
Assignee:
SEIKO EPSON CORP
International Classes:
H04R17/00; H01L41/053; H01L41/09; H01L41/113
Attorney, Agent or Firm:
Satoshi Nakai
Hiroki Matsuoka
Masayuki Imamura
Hiroki Matsuoka
Masayuki Imamura