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Title:
ULTRASONIC FLOWMETER EQUIPPED WITH DIAPHRAGM PRESSURE SENSOR, AND ITS MANUFACTURING METHOD
Document Type and Number:
Japanese Patent JP2008008706
Kind Code:
A
Abstract:

To provide an ultrasonic flowmeter equipped with a diaphragm pressure sensor suitable to be installed in an ultrasonic propagation passage of the ultrasonic flowmeter, having corrosion resistance by using a fluororesin, and its manufacturing method.

In this ultrasonic flowmeter equipped with the diaphragm pressure sensor 42 for measuring the pressure of chemical solution supplied into a chemical solution supply pipe 51 made of a fluororesin, a flow rate of the chemical solution is measured by an ultrasonic oscillation/reception parts 52A, 52B provided on both ends of the ultrasonic propagation passage 51A constituting a part of the chemical solution supply pipe under control of the pressure measured by the sensor 42. The diaphragm pressure sensor includes a diaphragm 43 formed by scraping thinly a part of a pipe wall of the chemical solution supply pipe constituting the ultrasonic propagation passage in order to form a pressure sensitive part in contact with the chemical solution, a reinforcing member 44 formed for the diaphragm, and a pressure/electricity conversion element formed for the reinforcing member.


Inventors:
Aizawa, Mitsuyoshi
Murakami, Hidekazu
Kamijo, Junichi
Tsukada, Masamori
Application Number:
JP2006000177999
Publication Date:
January 17, 2008
Filing Date:
June 28, 2006
Export Citation:
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Assignee:
ATSUDEN:KK
TEM-TECH KENKYUSHO:KK
International Classes:
G01F1/66; G01L19/00; G01F1/66; G01L19/00