Title:
ULTRASONIC MOTOR
Document Type and Number:
Japanese Patent JP2015154657
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide an ultrasonic motor which prevents deterioration in positional accuracy and responsiveness due to a fitting gap of a guide shaft without adding a component such as a spring component and has high positional accuracy and high speed responsiveness.SOLUTION: An ultrasonic motor comprises: a diaphragm which has a protrusion and can perform ultrasonic vibration; a piezoelectric element which is provided in the diaphragm; a friction member with which the protrusion of the diaphragm is brought into contact and in which one of the diaphragm and the friction member performs relative reciprocation with respect to the other with the displacement of the protrusion of the diaphragm due to the vibration of the diaphragm; and a guide member which guides the diaphragm or the friction member in a direction of the relative reciprocation. The displacement of the protrusion of the diaphragm due to the vibration of the diaphragm includes a constituent in a Y direction orthogonal to any of an X direction of the relative reciprocation and a Z direction being a plate thickness direction of a plane part of the diaphragm.
Inventors:
NISHITANI HITOSHI
Application Number:
JP2014028198A
Publication Date:
August 24, 2015
Filing Date:
February 18, 2014
Export Citation:
Assignee:
CANON KK
International Classes:
H02N2/00; G02B7/04; H01L41/053; H01L41/09
Attorney, Agent or Firm:
Okabe
Shinichi Usui
Takao Ochi
Seiichiro Takahashi
Koji Yoshizawa
Masami Saito
Katsuhiko Kimura
Naofumi Tanaka
Shinichi Usui
Takao Ochi
Seiichiro Takahashi
Koji Yoshizawa
Masami Saito
Katsuhiko Kimura
Naofumi Tanaka