超音波モータ、駆動制御システム、光学機器および振動子

Japanese Patent JP7293429

B2

Provided is an ultrasonic motor including an annular vibrator and an annular moving member that is brought into pressure-contact with the vibrator. The vibrator includes an annular vibrating plate and an annular piezoelectric element. The piezoelectric element includes an annular lead-free piezoelectric ceramic piece, a common electrode arranged on one surface of the piezoelectric ceramic piece, and a plurality of electrodes arranged on the other surface of the piezoelectric ceramic piece. The plurality of electrodes include two drive phase electrodes, one or more non-drive phase electrodes, and one or more detection phase electrodes. A second surface of the vibrating plate includes a plurality of groove regions extending radially, and the depths of the groove regions change in a circumferential direction along a curve obtained by superimposing one or more sine waves on one another. The ultrasonic motor exhibits a sufficient drive speed while suppressing generation of an unnecessary vibration wave.

WO/1999/044279	ULTRASONIC MOTOR
JP2021101219	ROTATING DEVICE, OPTICAL DEFLECTOR, DISPLAY SYSTEM, AND MOVABLE BODY
WO/2022/004792	DRIVE UNIT, OPTICAL ELEMENT DRIVE DEVICE, CAMERA MODULE, AND CAMERA-EQUIPPED DEVICE

Akihiro Hayashi
Tatsuo Furuta
Miki Ueda
Hidenori Tanaka
Shinya Koyama
Kaoru Miura
Atsushi Kimura
Satoshi Fujita

JP2022022673A

June 19, 2023

February 17, 2022

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Canon Inc

H02N2/12; H02N2/16

JP2009165231A
JP2014168056A
JP2012195577A
JP2001298975A
JP2015208214A
JP2013219316A
JP7298652A
JP3230771A
JP2001045774A
JP2006271034A
JP7115782A
JP2003319668A

Okabe
Takao Ochi
Koji Yoshizawa
Aki Honda

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