Title:
ULTRASONIC NOZZLE UNIT AND DEVICE AND METHOD FOR TREATING WITH ULTRASONIC WAVE USING THE SAME
Document Type and Number:
Japanese Patent JP2001096243
Kind Code:
A
Abstract:
To provide a slit type ultrasonic nozzle unit that is used while using a high temperature liquid as a treating liquid and has high treatment efficiency and to provide an ultrasonic treatment device using such a nozzle.
This ultrasonic nozzle units 1, 1a, 1b and 1c are provided with a diaphragm for generating ultrasonic waves. An additive 10, 32, 50 and 69 is used for adhering/fixing an oscillator 8, 31, 49 and 68 to the diaphragm 9, 24, 43 and 67 and cooled by a cooling medium.
Inventors:
HAYAMIZU NAOYA
HIRABAYASHI HIDEAKI
MATSUSHIMA DAISUKE
HIRABAYASHI HIDEAKI
MATSUSHIMA DAISUKE
Application Number:
JP28119399A
Publication Date:
April 10, 2001
Filing Date:
October 01, 1999
Export Citation:
Assignee:
TOSHIBA CORP
SHIBAURA MECHATRONICS CORP
SHIBAURA MECHATRONICS CORP
International Classes:
B08B3/12; B08B3/08; H01L21/304; (IPC1-7): B08B3/12; H01L21/304
Attorney, Agent or Firm:
Norio Ogo (1 outside)
Previous Patent: TREATING METHOD OF SEMICONDUCTOR DEVICE
Next Patent: METHOD AND DEVICE FOR WASHING IN IMPROVED CHAMBER
Next Patent: METHOD AND DEVICE FOR WASHING IN IMPROVED CHAMBER