Title:
ULTRASONIC TRANSDUCER DEVICE, ULTRASONIC PROBE, AND ULTRASONIC MEASURING APPARATUS
Document Type and Number:
Japanese Patent JP2017208596
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide an ultrasonic measuring apparatus which does not need to install a position of a light detecting unit with respect to a vibrating film with high positional accuracy in a plan view of a substrate.SOLUTION: An ultrasonic transducer device 1 includes: a substrate 2 having an opening portion 3; a vibration film 5 installed on the substrate 2; a piezoelectric element 9 being installed on the vibration film 5 and vibrating the vibration film 5; and a light detection unit 14 for detecting vibration of the vibration film 5 by using reflected light 15b. The light detection unit 14 is positioned at a side opposite to the substrate 2 with respect to the vibration film 5.SELECTED DRAWING: Figure 1
Inventors:
MATSUDA YOJI
Application Number:
JP2016097690A
Publication Date:
November 24, 2017
Filing Date:
May 16, 2016
Export Citation:
Assignee:
SEIKO EPSON CORP
International Classes:
H04R23/00; A61B8/14; G01N29/24; H04R17/00
Domestic Patent References:
| JP2014127921A | 2014-07-07 | |||
| JPH09210762A | 1997-08-15 | |||
| JP2016049125A | 2016-04-11 | |||
| JP2015187576A | 2015-10-29 |
Attorney, Agent or Firm:
Kazuaki Watanabe
Keisuke Nishida
Satoshi Nakai
Keisuke Nishida
Satoshi Nakai