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Title:
ULTRASONIC TRANSDUCER, MANUFACTURING METHOD THEREOF, AND ULTRASONIC IMAGING DEVICE
Document Type and Number:
Japanese Patent JP2018056734
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide an ultrasonic transducer that has reduced driving voltage and increased reliability.SOLUTION: An ultrasonic transducer includes: a hollow section 110 formed between insulation films 104 and 106 sandwiched between a lower electrode 103 and an upper electrode 107 on a substrate 101; and a membrane 120 that is composed of insulation films 106, 108, 111 and 112 upward of the hollow section 110 and the upper electrode 107 and vibrates when ultrasonic waves are transmitted or received. In addition, the hollow section 110 has a cross-sectional shape satisfying a relation of h1>h2>0, where h1 denotes the thickness of a center section and h2 denotes the thickness of the outer periphery.SELECTED DRAWING: Figure 2

Inventors:
HASEGAWA HIROAKI
MACHIDA SHUNTARO
TAKEZAKI TAICHI
RYUZAKI DAISUKE
Application Number:
JP2016189023A
Publication Date:
April 05, 2018
Filing Date:
September 28, 2016
Export Citation:
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Assignee:
HITACHI LTD
International Classes:
H04R19/00; A61B8/14; H04R31/00
Attorney, Agent or Firm:
特許業務法人筒井国際特許事務所