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Title:
ULTRASONIC VIBRATOR FOR CLEANING
Document Type and Number:
Japanese Patent JP2007157786
Kind Code:
A
Abstract:

To solve the problem that, in the conventional ultrasonic cleaning equipment, contaminants flow together with a cleaning liquid after cleaning a plane portion of an object to be cleaned, and then are collected and caught in the edge of the object to be cleaned.

At one end of a vibration transmitter 12, an installation end 14 is formed to attach a piezoelectric element 13. From an end 12a on the other end of the vibration transmitter 12 toward the opposite end 12b, a sloped plane 15 is formed which is sloped at 0-45° from a plane parallel to the plane of the installation end 14. There is a cutout 16 formed between the end 12a of the sloped plane 15 of the vibration transmitter 12 and the installation end. The location (distance) of the cutout 16 and the angle of the sloped plane are properly set, so that ultrasonic waves which have passed through the cutout 16 may be reflected on the sloped plane 15 to be propagated to the lower plane of the cutout 16 without reaching the upper plane of the cutout 16.


Inventors:
HONDA YOSUKE
YAMAMORI HARUO
MAITA YUICHI
KONDO RIYOUJI
FUJIWARA NAOYUKI
HIKITA TOMOMI
MURAMATSU KIWA
Application Number:
JP2005347109A
Publication Date:
June 21, 2007
Filing Date:
November 30, 2005
Export Citation:
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Assignee:
HONDA ELECTRONIC
International Classes:
H01L21/304; B06B1/06; B08B3/12; G02F1/13; G02F1/1333
Domestic Patent References:
JP2000279888A2000-10-10
JP2001046985A2001-02-20
Attorney, Agent or Firm:
Kazuo Suzuki