PURPOSE: To improve an S/N by providing the 1st and the 2nd electrodes on both sides of a piezoelectric body so as to face partially the electrodes via the piezoelectric body to increase the beam width of a probe and providing a grounded conductor layer.
CONSTITUTION: Plural piezoelectric elements 1 are fixed on a packing member 2, an ultrasonic wave irradiating surface of the elements 1 is covered with an acoustic matching layer 3 to form an array type ultrasonic wave probe. The 1st and the 2nd electrodes 1b, 1c are formed on both sides of the piezoelectric body 1a of the elements 1 so that the electrodes 1b, 1c form a facing part D near the center of the piezoelectric body 1a. A matching layer 3 is formed by an insulating layer 3a, a conductor layer 3b and a protective film 3c, the conductor layer 3b is grounded by the electrode 1b and an input terminal Vin for the ultrasonic wave is connected to the electrode 1c. Thus, the beam width of the probe is increased and the S/N is improved.
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SUZUKI SHIYUUJI
HONDA HIROKI
UCHIUMI ISAO
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