ULTRAVIOLET GENERATION TARGET AND METHOD OF MANUFACTURING THE SAME

Title:

ULTRAVIOLET GENERATION TARGET AND METHOD OF MANUFACTURING THE SAME

Document Type and Number:

Japanese Patent JP2017004789

Kind Code:

A

Abstract:

PROBLEM TO BE SOLVED: To provide an ultraviolet generation target capable of enhancing extraction efficiency of ultraviolent light and also to provide a method of manufacturing the same.SOLUTION: An ultraviolet generation target 1A includes: a sapphire substrate 21 through which ultraviolet light UV passes; an intermediate layer 22 which is in contact with the sapphire substrate 21, which includes an oxygen atom and an aluminum atom in a composition and through which ultraviolet light passes; and a light-emitting layer 23 which is provided on the intermediate layer 22, which includes oxide crystal containing rare earth to which an activator is added and which receives electron beams EB to generate ultraviolet light UV.SELECTED DRAWING: Figure 2

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