Title:
ULTRAVIOLET RAY EXPOSURE DEVICE
Document Type and Number:
Japanese Patent JPH0750237
Kind Code:
A
Abstract:
PURPOSE: To enable an ultraviolet ray emitting lamp to be sufficiently cooled down for avoiding the deposition of the title device.
CONSTITUTION: Within the title ultraviolet ray exposure device, an ultraviolet ray emitting lamp 1 and an independent fluid path encircling an ultraviolet ray emitting lamp 1 for passing a cooling down fluid are formed, as well as an exposure chamber 6 forming a space containing the cooling down fluid path 2 passing ultraviolet rays 4, a lighting optical system 5 and coupling with the cooling down fluid path 2 for encircling the lighting optical system 5 is provided.
Inventors:
FUJIE NOBUO
OBARA HITOSHI
KUROIWA KEIJI
NAKAMURA MASAKI
OBARA HITOSHI
KUROIWA KEIJI
NAKAMURA MASAKI
Application Number:
JP19481193A
Publication Date:
February 21, 1995
Filing Date:
August 05, 1993
Export Citation:
Assignee:
FUJITSU LTD
International Classes:
H01L21/027; (IPC1-7): H01L21/027
Attorney, Agent or Firm:
Keishiro Takahashi
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