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Title:
ULTRAVIOLET SOURCE LAMP
Document Type and Number:
Japanese Patent JPS62290099
Kind Code:
A
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Inventors:
INUSHIMA TAKASHI
HAYASHI SHIGENORI
Application Number:
JP13407486A
Publication Date:
December 16, 1987
Filing Date:
June 10, 1986
Export Citation:
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Assignee:
SEMICONDUCTOR ENERGY LAB
International Classes:
H01J61/72; H05B41/24; (IPC1-7): H01J61/72; H05B41/24
Domestic Patent References:
JPS528025A1977-01-21
JPS59149645A1984-08-27
JPS534377A1978-01-14



 
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