Title:
ULTRAVIOLET WASHING MACHINE
Document Type and Number:
Japanese Patent JP3526204
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To prevent the occurrence of corrosion of material susceptible to corrosion being on the surface of material to be washed and also to sufficiently attain the removing effect of organic matter stuck to the surface of the material to be washed.
SOLUTION: In an uiltraviolet washing machine wherein ultraviolet lamps 22 for irradiating ultraviolet rays of 172 nm±20 nm wavelength are arranged in an ultraviolet lamp housing 20 provided with an irradiation window 24 not absorbing ultraviolet rays of 172 nm±20 nm wavelength and preventing the ultraviolet rays of 172 nm±20 nm from being absorbed by oxygen and the ultrasonic rays of 172 nm±20 nm wavelength irradiated from the ultraviolet lamps 22 are irradiated to material to be washed 16 through the irradiation window 24, a distance L between an outer surface 24a opposite to the material 16 to be washed 16 of the irradiation window 24 and a surface 16a opposite to the irradiation window 24 of the material to be washed 16 is made 0<L≤15 mm.
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Inventors:
Shimada, Kiyoshi
Kitagawa, Kenichi
Sato, Masaki
Kitagawa, Kenichi
Sato, Masaki
Application Number:
JP4284898A
Publication Date:
May 10, 2004
Filing Date:
February 09, 1998
Export Citation:
Assignee:
SHIMADA PHYS & CHEM IND CO LTD
International Classes:
B08B7/00; (IPC1-7): B08B7/00
Attorney, Agent or Firm:
上島 淳一
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