Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
UNDERCOATING LAYER FORMING MATERIAL FOR LITHOGRAPHY AND WIRING FORMING METHOD USING THE SAME
Document Type and Number:
Japanese Patent JP2005173552
Kind Code:
A
Abstract:

To provide an undercoating layer forming material for lithography which has good storage stability, ensures excellence in the form of the lower portion of a resist pattern and solves the problem such as lowering of burying properties and occurrence of voids, and to provide a method for forming a wiring using the same.

The undercoating layer forming material for lithography contains at least polysiloxane and an organotitanium compound having no alkoxy group. The method for forming a wiring includes a photoresist pattern forming step of applying the undercoating layer forming material for lithography onto a substrate, curing it to form an undercoating layer, forming a photoresist layer thereon, and forming a predetermined photoresist pattern; an undercoating layer patterning step of removing the exposed portion of the undercoating layer by dry etching; a wiring pattern forming step of forming a predetermined wiring pattern using the photoresist pattern and the patterned undercoating layer as masks; and an undercoating layer removing step of removing the undercoating layer and photoresist pattern remaining on the substrate.


Inventors:
TANAKA TAKESHI
HAGIWARA YOSHIO
Application Number:
JP2004268782A
Publication Date:
June 30, 2005
Filing Date:
September 15, 2004
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
TOKYO OHKA KOGYO CO LTD
International Classes:
G03F7/11; B32B9/04; G03F7/004; G03F7/075; G03F7/09; H01L21/027; H01L21/3205; H01L21/768; (IPC1-7): G03F7/11; G03F7/004; G03F7/075; H01L21/027; H01L21/3205
Attorney, Agent or Firm:
Hiroaki Sakai