Title:
LIGHT WAVE INTERFERENCE STEPPER FOR BALL STEP GAUGE MEASUREMENT
Document Type and Number:
Japanese Patent JP3210964
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To accurately and quickly calibrate the dimension of a ball step gauge by using a light wave interference measuring means directly using the light length of lights as a length standard, and following an Abbe principle during the measurement.
SOLUTION: A spherical seat constituted of three spheres 23 is provided at the lower part of a first spacer 22 at the lower part of an upper plate 21, and loaded on a first ball 5 of a ball step gauge. At that time, two cylindrical bars 25 provided at the lower part of a second spacer 24 are loaded on a ball 5', and a small sphere 26 projected at the lower part of the upper plate 21 is butted to a face in parallel with the axial lines of the balls 5 and 5' constituting the frame body of the ball step gauge so that rolling can be prevented, and 6 point support can be realized. Mirror supporting arms 30 are provided at the both sides of the upper plate 21, and a mirror 32 is fixed through a position adjusting means using screws 38 to each mirror supporting arm 30. The mirror is irradiated with lights from a publicly known light interference measuring device, and the position is exactly measured.
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Inventors:
Toshiyuki Takatsuji
Takamitsu Ohsawa
Kurosawa Tomizo
Hironori Noguchi
Takamitsu Ohsawa
Kurosawa Tomizo
Hironori Noguchi
Application Number:
JP17229199A
Publication Date:
September 25, 2001
Filing Date:
June 18, 1999
Export Citation:
Assignee:
Director, AIST, Ministry of Economy, Trade and Industry
International Classes:
G01B5/00; G01B9/02; G01B11/00; G01B21/20; (IPC1-7): G01B11/00; G01B5/00; G01B9/02; G01B21/20
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