Title:
UNIDIRECTIONAL MAGNETIC FIELD GENERATOR
Document Type and Number:
Japanese Patent JPH06224065
Kind Code:
A
Abstract:
PURPOSE: To provide a magnetic field generator to achieve anisotropy with a signal axis in predetermined direction. CONSTITUTION: A device for depositing magnetic material on a substrate 14 has a permanent magnetic assembly 22 formed of prices of permanent magnetic producing a unidirectional magnetic field. The permanent magnet assembly is made of ceramic magnetic tiles which are combined to form a preferably arc-shaped strip. This permanent magnet strip is positioned outside a depositing chamber in such a way that the lines of magnetic induction traverse a work piece or a wafer in the chamber.
Inventors:
HOAACHIN TON
JIYON JIEI NIYUUMAN
HONNSHIAN JIEEMUZU UU
JIYON JIEI NIYUUMAN
HONNSHIAN JIEEMUZU UU
Application Number:
JP17037793A
Publication Date:
August 12, 1994
Filing Date:
July 09, 1993
Export Citation:
Assignee:
READ RITE CORP
International Classes:
C23C14/35; G11B5/31; H01F41/18; H01J37/34; H05H1/46; (IPC1-7): H01F41/18; G11B5/31; H05H1/46
Attorney, Agent or Firm:
Shoichi Hase (2 outside)