To provide a unit for spreading a liquid material capable of preventing a spreading needle from shifting on a substrate at the time of spreading ink.

The unit for spreading the liquid material which spreads the liquid material over the defect part of the fine pattern formed on the substrate is provided with a spreading mechanism. a Z-axis driving mechanism (a motor 21 and a ball screw 23) and a connecting mechanism (a ball screw connecting plate 25 and a connecting plate 26). The spreading mechanism spreads the liquid material over the defect part of the fine pattern. The Z-axis driving mechanism moves the spreading mechanism in a Z-axis direction crossing to the surface of the substrate. The connecting mechanism connects a Z-axis working plate 28 of the spreading mechanism with the ball screw 23 of the Z-axis driving mechanism. The Z-axis working plate 28 of the spreading mechanism includes a region forming a space between the Z-axis working plate 28 and the connecting mechanism in other parts than a connecting part 29 connected with the connecting mechanism.