PURPOSE: To prevent a clean region from being fouled by blown-up dusts by a method wherein a fine clearance is divided by a punched plate formed in parallel with a side plate into an upper clean region and a lower driving device- mounting region communicating with a discharging port.

CONSTITUTION: A punched plate 21 is arranged in parallel with a bottom plate 14 within a transporting part 20. A fine clearance 26 is formed at a central part in parallel with a side plate 11. Air within a clean region 22 is circulated by an air blower 40 in a direction indicated by an arrow and then the air is cleaned through an ultra ULPA filter 24. A receiving pan 51 storing a wafer Y is supported by a supporting block 52, moved by a driving device 53 through a connecting lever 54. When the wafer Y is transported, dusts adhered to the wafer Y is blown off by an air flow circulated. Almost of all dusts is filtered and removed by a filter 24, a part of the dusts floats within the driving device mounting region 23, adheres to the driving device 53. The dusts are blown up by a subsequent air flow from the driving device 53. Since it is depressed by an air resistance of the punched plate, the interior of the clean region 22 is not contaminated.