Title:
PRODUCTION OF LEAD-BASE PEROVSKITE-TYPE COMPLEX OXIDE THIN FILM
Document Type and Number:
Japanese Patent JP3161825
Kind Code:
B2
Abstract:
PURPOSE: To efficiently produce a lead-base perovskite-type complex oxide thin film by adding an org. compd. contg. lead to a soln. of an org. compd. contg. other metals, further adding a specified amt. of oxides, applying the mixture on the surface of a substrate and heat-treating the mixture.
CONSTITUTION: A lead-contg. org. compd. or its derivative is added to a soln. of an org. compd. contg. a metal element (the metal has 2-6 valency and 4 valency in total). The alkoxides, org. acid salt, bis-acetylacetonate complex salt, etc., are preferably used as the org. compds. The oxide powder by ≤10mol%, preferably by 0.01-10mol%, is further added to the soln. as the crystalline nucleus species. The soln. is uniformly mixed, subjected to reaction, concentrated and applied on the surface of a substrate. The org. compd. in the coating film is then thermally decomposed. The decomposition is preferably carried out in the gaseous mixture consisting of oxygen ozone or oxygen, ozone and steam from the heating stage to the midst of the maximum-temp. zone. The coating film is then heat-treated to from a lead-base peroviskite-type complex oxide thin film.
Inventors:
Yutaka Shimahara
Shinichi Hirano
Yogo Toshinobu
Shinichi Hirano
Yogo Toshinobu
Application Number:
JP21012992A
Publication Date:
April 25, 2001
Filing Date:
August 06, 1992
Export Citation:
Assignee:
MURATA MANUFACTURING CO.,LTD.
Shinichi Hirano
Shinichi Hirano
International Classes:
C23C18/12; H01G4/12; (IPC1-7): C23C18/12
Domestic Patent References:
| JP4242005A |
Other References:
第３５回人工鉱物討論会講演要旨集 １３−１４頁
Attorney, Agent or Firm:
Aoyama Ryo (1 person outside)
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