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Patent Searching and Data


Title:
α-UNSATURATED ACYLOXY-γ-BUTYLOLACTONE DERIVATIVE, POLYMER COMPOUND AND RESIN COMPOSITION FOR PHOTORESIST
Document Type and Number:
Japanese Patent JP2006036891
Kind Code:
A
Abstract:

To provide a compound having a new lactone skeleton which is useful as a constituent monomer for photoresist resins.

The α-unsaturated acyloxy-γ-butylolactone derivative is represented by formula (1) (wherein Ra is a hydrogen atom, a halogen atom, a 1-6C alkyl group or a 1-6C haloalkyl group;Rb is an acid-leaving group; R1 and R2 are same or different and they are each a hydrocarbon group and R1 and R2 may mutually be combined to form a ring together with an adjacent carbon atom; R3 and R4 are same or different and they are each hydrogen atom or a hydrocarbon group).


Inventors:
Koyama, Yutaka
Sumita, Mari
Application Number:
JP2004000217765
Publication Date:
February 09, 2006
Filing Date:
July 26, 2004
Export Citation:
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Assignee:
DAICEL CHEM IND LTD
International Classes:
C08F220/28; C07D307/33; C08F232/00; G03F7/039; H01L21/027; C07B61/00
Attorney, Agent or Firm:
後藤 幸久