Title:
α-UNSATURATED ACYLOXY-γ-BUTYLOLACTONE DERIVATIVE, POLYMER COMPOUND AND RESIN COMPOSITION FOR PHOTORESIST
Document Type and Number:
Japanese Patent JP2006036892
Kind Code:
A
Abstract:
To provide a compound having a new lactone skeleton which is useful as a constituent monomer for photoresist resins.
The α-unsaturated acyloxy-γ-butylolactone derivative is represented by formula (1) (wherein Ra is a hydrogen atom, a halogen atom, a 1-6C alkyl group or a 1-6C haloalkyl group; R1 and R2 are same or different and they are each a hydrocarbon group and R1 and R2 may mutually be combined to form a ring together with an adjacent carbon atom; R3 and R4 are same or different and they are each hydrogen atom or a hydrocarbon group; the carboxyl group represented in the formula may be a form of a salt).
Inventors:
KOYAMA YUTAKA
MURAI YOSHIYUKI
NISHIMURA MASAMICHI
MURAI YOSHIYUKI
NISHIMURA MASAMICHI
Application Number:
JP2004217766A
Publication Date:
February 09, 2006
Filing Date:
July 26, 2004
Export Citation:
Assignee:
DAICEL CHEM
International Classes:
C08F220/28; C07D307/94; C08F232/00; G03F7/039; C07B61/00
Attorney, Agent or Firm:
Yukihisa Goto