UPRIGTH HEAT TREATMENT DEVICE

Title:

UPRIGTH HEAT TREATMENT DEVICE

Document Type and Number:

Japanese Patent JPH04120724

Kind Code:

A

Abstract:

PURPOSE: To provide an upright heat treatment device capable of keeping on standing even in case of an earthquake by providing a mechanism attached to an upper portion of an upright boat to prevent the wafer-loaded boat on standby from rocking.

CONSTITUTION: A boat stage 42 includes a base 44 that is engaged with the bottom of a boat 4 to support it upright. The base 44 is capable of translation on a rail 46 by a motor and a ball screw. A plate 100 with a U-groove 102 is provided above one end of the rail. When the base 44 with the boat 4 on it is moved to the end of the rail, the U-groove 102 receives a projection 104 that is provided on the top of the boat. Therefore, the boat is prevented from falling oven even if there are shocks, for example, due to an earthquake.

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Inventors:

ASANO TAKAYASU

Application Number:

JP24196890A

Publication Date:

April 21, 1992

Filing Date:

September 12, 1990

Export Citation:

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Assignee:

TEL SAGAMI LTD

International Classes:

H01L21/22; H01L21/205; H01L21/31; (IPC1-7): H01L21/205; H01L21/22; H01L21/31

Attorney, Agent or Firm:

Suyama Saichi

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