Title:
アルミニウム鏡のためのCMPの使用、及び太陽電池の製造
Document Type and Number:
Japanese Patent JP5155858
Kind Code:
B2
Abstract:
The invention is directed to a method of polishing a surface of a substrate comprising aluminum, comprising contacting a surface of the substrate with a polishing pad and a polishing composition comprising an abrasive, an agent that oxidizes aluminum, and a liquid carrier, and abrading at least a portion of the surface to remove at least some aluminum from the substrate and to polish the surface of the substrate, wherein the abrasive is in particulate form and is suspended in the liquid carrier.
Inventors:
Blue chic, blaster
Jenkins, Richard
Thompson, Christopher
Jenkins, Richard
Thompson, Christopher
Application Number:
JP2008519451A
Publication Date:
March 06, 2013
Filing Date:
June 22, 2006
Export Citation:
Assignee:
CABOT MICROELECTRONICS CORPORATION
International Classes:
B24B37/12; B24B37/00; B24B37/24
Domestic Patent References:
| JP1246068A | ||||
| JP2185365A | ||||
| JP2003264161A | ||||
| JP2002059357A | ||||
| JP2004014744A | ||||
| JP2002100592A | ||||
| JP6069187A | ||||
| JP2005001059A | ||||
| JP2003100682A |
Attorney, Agent or Firm:
Atsushi Aoki
Takashi Ishida
Tetsuji Koga
Satoshi Deno
Atsushi Ebiya
Nobuo Sekine
Takashi Ishida
Tetsuji Koga
Satoshi Deno
Atsushi Ebiya
Nobuo Sekine