Title:
VACUUM ATTRACTING AND FIXING MEANS
Document Type and Number:
Japanese Patent JPS594045
Kind Code:
A
Abstract:
PURPOSE:To prevent wearness and missing of chuck table by closely attaching the circumferential part consisting of a material which does not allow the air to pass through to the chuck table. CONSTITUTION:The circumferential part of chuck table 21 formed with a porous material is surrounded by the circumferential part 20 consisting of a material which is sufficiently dense and does not allow the air to pass through. The circumferential part 20 is so formed that it is closely attached to the table 21. Since such a circumferential part 20 is provided, the table 21 is attracted by a vacuum chamber 19 at the time when air is exhausted from an exhaustion duct 15 and a wafer 12 is attracted and fixed to the table 21. In such a structure, the grinding liquid penetrates into the table 12 with a reduced degree and since the external edge of wafer 12 is placed on the surface of circumferential part 20, wearness and missing of table 21 is little generated. Accordingly, the wafer 12 is not broken or does not generate missing of a part thereof.
Inventors:
INOMATA SHIGEO
Application Number:
JP11314182A
Publication Date:
January 10, 1984
Filing Date:
June 30, 1982
Export Citation:
Assignee:
FUJITSU LTD
International Classes:
B23Q3/08; H01L21/304; H01L21/677; H01L21/68; H01L21/683; (IPC1-7): H01L21/304
Domestic Patent References:
| JPS5390781A | 1978-08-09 | |||
| JPS56172941U | 1981-12-21 | |||
| JPS5390871A | 1978-08-10 |
Attorney, Agent or Firm:
Motoaki Hisagi