Title:
真空チャンバーの減圧方法
Document Type and Number:
Japanese Patent JP3596757
Kind Code:
B2
Inventors:
Kazuhiro Sugiyama
Application Number:
JP2000338401A
Publication Date:
December 02, 2004
Filing Date:
November 06, 2000
Export Citation:
Assignee:
Sharp Corporation
International Classes:
B01J3/00; B01J19/08; C23C14/00; C23C16/44; H01L21/205; (IPC1-7): H01L21/205; B01J3/00; B01J19/08; C23C14/00; C23C16/44
Domestic Patent References:
| JP9234358A | ||||
| JP3106432A | ||||
| JP8274028A | ||||
| JP11040396A | ||||
| JP8181117A | ||||
| JP54077573A |
Attorney, Agent or Firm:
Hidesaku Yamamoto