To provide a vacuum chamber capable of preventing a leak caused by thermal expansion of a rib due to heating.
The vacuum chamber includes: a case 20 having a first wall surface and a second wall surface as inner wall surfaces facing each other; a door 12 which seals, via a seal member 26, an opening 18 formed through a door-mounting wall surface with the first wall surface as its inner wall surface; a heating mechanism 24 arranged inside the case 20; and a rib 22 having one end separated from the first wall surface and the another end fixed to the second wall surface between the first and second wall surfaces in the atmospheric pressure. The inside of the case 20 of the vacuum chamber can be vacuum-exhausted by sealing the opening 18 with the door 12.
| JP2002270518A | 2002-09-20 | |||
| JP2010043352A | 2010-02-25 | |||
| JP2010275615A | 2010-12-09 | |||
| JP2005342465A | 2005-12-15 | |||
| JPH07273095A | 1995-10-20 | |||
| JPS62292408A | 1987-12-19 |
Masakazu Ito
Suzuki Isobe
Next Patent: CLEANING DRYING DEVICE FOR BOOT FOR CLEAN ROOM