To make a vacuum chamber easy to assemble and to suppress the weld burning and distortion as much as possible.
This chamber is provided with a cylindrical chamber main body 1 having an opening on its outer periphery a mounting seat 3 connected to the opening of the main body 1 and communicating the inside of the main body 1 with its outside, a slit plate 2 fixed to the inside of the seat 3 to partition the inside and outside of the main body 1 and an exhaust port 4 with one end connected to the seat 3 and the other end flange-joined to a vacuum pump. Further, only the seat 3 is electron-beam-welded to the main body 1, only the face of the seat 3 to be attached to the main body 1 is machined, and a faucet joint structure is not needed since the slit plate 2 is attached to the seat 3.
| WO/2019/122131 | BAROMETRIC LIQUID LOCKS |
| JPS5819331 | [Title of the Invention] Closing appliance |
SENNIYU KATSUYA
FUJITA KAZUHISA
Next Patent: LIQUID RECOVERING STRUCTURE OF LIQUID MATERIAL VAPORIZING AND SUPPLYING DEVICE