Title:
真空チャック装置
Document Type and Number:
Japanese Patent JP5820672
Kind Code:
B2
Inventors:
Kenji Izumi
Application Number:
JP2011199065A
Publication Date:
November 24, 2015
Filing Date:
September 13, 2011
Export Citation:
Assignee:
Izumi Corporation Co., Ltd.
International Classes:
B23Q3/08; F04B37/14; F15B15/14
Domestic Patent References:
| JP11132139A | ||||
| JP2007083354A | ||||
| JP62218665A | ||||
| JP2000265951A | ||||
| JP2003028106A |
Foreign References:
| US20030072653 |
Attorney, Agent or Firm:
Yoshiaki Niike