Title:
VACUUM CHUCK DEVICE
Document Type and Number:
Japanese Patent JPS5231449
Kind Code:
A
Abstract:
PURPOSE: To provide a device characterized in that re-adsorption is possible by only attaching a load to a vacuum chuck when any form of the load is treated by a physical distribution terminal and the like.
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Inventors:
HIRAI HIROTAKE
MATSUZAKI ATSUSHI
MATSUZAKI ATSUSHI
Application Number:
JP10694875A
Publication Date:
March 09, 1977
Filing Date:
September 05, 1975
Export Citation:
Assignee:
HITACHI LTD
International Classes:
B66C1/02; B25J15/06; B66C1/00; F16B47/00; (IPC1-7): B66C1/02; F16B47/00