Title:
VACUUM CHUCK
Document Type and Number:
Japanese Patent JPH1145931
Kind Code:
A
Abstract:
To provide a vacuum chuck that holds an object material without coming into contact with a material other than the object material which should be held.
A chuck main body 3 that has a suction plate 1 provided with a suction port 1a sucking an object material and an exhaust pipe 2 discharging the air sucked in the suction plate 1 through the suction port 1a to the outside, and a guiding part 5 that has an engaging part 4 containing the suction plate 1 and engaging with the peripheral part of the object material, are provided, and the engaging part 4 is provided to a tip part 8a of the guiding part 5, and further the suction plate 1 can be put in/out from the guiding part 5 at will.
Inventors:
NISHIDA MAKOTO
Application Number:
JP20046797A
Publication Date:
February 16, 1999
Filing Date:
July 25, 1997
Export Citation:
Assignee:
KYUSHU NIPPON ELECTRIC
International Classes:
B23Q7/04; H01L21/677; H01L21/68; (IPC1-7): H01L21/68; B23Q7/04
Domestic Patent References:
| JPS61140417A | 1986-06-27 | |||
| JPS60183429A | 1985-09-18 |
Attorney, Agent or Firm:
Masatake Shiga